1/15/2013	9:14:28 AM	Main Vac valve closed
1/15/2013	9:14:40 AM	Main Vac valve opened
1/15/2013	9:15:16 AM	Recipe started at 9:15 AM
1/15/2013	9:15:16 AM	Helium valve closed
1/15/2013	9:15:16 AM	H2 valve closed
1/15/2013	9:15:16 AM	BCl3 valve closed
1/15/2013	9:15:16 AM	PH3 valve closed
1/15/2013	9:15:16 AM	SiCl4 pre valve closed
1/15/2013	9:15:16 AM	SiCl4 post valve closed
1/15/2013	9:15:16 AM	Main Vac valve closed
1/15/2013	9:15:16 AM	Bypass valve closed
1/15/2013	9:15:16 AM	Bubbler valve closed
1/15/2013	9:15:16 AM	Helium MFC set to  0.000000
1/15/2013	9:15:16 AM	H2 MFC set to  0.000000
1/15/2013	9:15:16 AM	BCl3 MFC set to  0.000000
1/15/2013	9:15:16 AM	PH3 MFC set to  0.000000
1/15/2013	9:15:16 AM	SiCl4 MFC set to  0.000000
1/15/2013	9:15:16 AM	Bypass solenoid MFC set to  0.000000
1/15/2013	9:15:16 AM	Tube furnace set to 0
1/15/2013	9:15:19 AM	Helium valve closed
1/15/2013	9:15:19 AM	BCl3 valve closed
1/15/2013	9:15:19 AM	PH3 valve closed
1/15/2013	9:15:19 AM	SiCl4 pre valve closed
1/15/2013	9:15:19 AM	SiCl4 post valve closed
1/15/2013	9:15:19 AM	Main Vac valve closed
1/15/2013	9:15:19 AM	Bypass valve closed
1/15/2013	9:15:19 AM	Bubbler valve closed
1/15/2013	9:15:19 AM	H2 valve opened
1/15/2013	9:15:19 AM	Helium MFC set to  0.000000
1/15/2013	9:15:19 AM	H2 MFC set to  500.000000
1/15/2013	9:15:19 AM	BCl3 MFC set to  0.000000
1/15/2013	9:15:19 AM	PH3 MFC set to  0.000000
1/15/2013	9:15:19 AM	SiCl4 MFC set to  0.000000
1/15/2013	9:15:19 AM	Bypass solenoid MFC set to  0.000000
1/15/2013	9:15:19 AM	Tube furnace set to 0
1/15/2013	9:16:35 AM	Helium valve closed
1/15/2013	9:16:35 AM	BCl3 valve closed
1/15/2013	9:16:35 AM	PH3 valve closed
1/15/2013	9:16:35 AM	SiCl4 pre valve closed
1/15/2013	9:16:35 AM	SiCl4 post valve closed
1/15/2013	9:16:35 AM	Main Vac valve closed
1/15/2013	9:16:35 AM	Bypass valve closed
1/15/2013	9:16:35 AM	H2 valve opened
1/15/2013	9:16:35 AM	Bubbler valve opened
1/15/2013	9:16:35 AM	Helium MFC set to  0.000000
1/15/2013	9:16:35 AM	H2 MFC set to  500.000000
1/15/2013	9:16:35 AM	BCl3 MFC set to  0.000000
1/15/2013	9:16:35 AM	PH3 MFC set to  0.000000
1/15/2013	9:16:35 AM	SiCl4 MFC set to  0.000000
1/15/2013	9:16:35 AM	Bypass solenoid MFC set to  0.000000
1/15/2013	9:16:35 AM	Tube furnace set to 0
1/15/2013	9:16:36 AM	Helium valve closed
1/15/2013	9:16:36 AM	BCl3 valve closed
1/15/2013	9:16:36 AM	PH3 valve closed
1/15/2013	9:16:36 AM	SiCl4 pre valve closed
1/15/2013	9:16:36 AM	SiCl4 post valve closed
1/15/2013	9:16:36 AM	Main Vac valve closed
1/15/2013	9:16:36 AM	Bypass valve closed
1/15/2013	9:16:36 AM	H2 valve opened
1/15/2013	9:16:36 AM	Bubbler valve opened
1/15/2013	9:16:36 AM	Helium MFC set to  0.000000
1/15/2013	9:16:36 AM	H2 MFC set to  500.000000
1/15/2013	9:16:36 AM	BCl3 MFC set to  0.000000
1/15/2013	9:16:36 AM	PH3 MFC set to  0.000000
1/15/2013	9:16:36 AM	SiCl4 MFC set to  0.000000
1/15/2013	9:16:36 AM	Bypass solenoid MFC set to  0.000000
1/15/2013	9:16:36 AM	Tube furnace set to 1000
1/15/2013	9:36:36 AM	Helium valve closed
1/15/2013	9:36:36 AM	PH3 valve closed
1/15/2013	9:36:36 AM	Main Vac valve closed
1/15/2013	9:36:36 AM	Bypass valve closed
1/15/2013	9:36:36 AM	H2 valve opened
1/15/2013	9:36:36 AM	BCl3 valve opened
1/15/2013	9:36:36 AM	SiCl4 pre valve opened
1/15/2013	9:36:36 AM	SiCl4 post valve opened
1/15/2013	9:36:36 AM	Bubbler valve opened
1/15/2013	9:36:36 AM	Helium MFC set to  0.000000
1/15/2013	9:36:36 AM	H2 MFC set to  450.000000
1/15/2013	9:36:36 AM	BCl3 MFC set to  1.300000
1/15/2013	9:36:36 AM	PH3 MFC set to  0.000000
1/15/2013	9:36:36 AM	SiCl4 MFC set to  50.000000
1/15/2013	9:36:36 AM	Bypass solenoid MFC set to  0.000000
1/15/2013	9:36:37 AM	Tube furnace set to 1000
1/15/2013	9:56:36 AM	Helium valve closed
1/15/2013	9:56:36 AM	BCl3 valve closed
1/15/2013	9:56:36 AM	PH3 valve closed
1/15/2013	9:56:36 AM	SiCl4 pre valve closed
1/15/2013	9:56:36 AM	SiCl4 post valve closed
1/15/2013	9:56:36 AM	Main Vac valve closed
1/15/2013	9:56:36 AM	Bypass valve closed
1/15/2013	9:56:36 AM	H2 valve opened
1/15/2013	9:56:36 AM	Bubbler valve opened
1/15/2013	9:56:36 AM	Helium MFC set to  0.000000
1/15/2013	9:56:36 AM	H2 MFC set to  500.000000
1/15/2013	9:56:37 AM	BCl3 MFC set to  0.000000
1/15/2013	9:56:37 AM	PH3 MFC set to  0.000000
1/15/2013	9:56:37 AM	SiCl4 MFC set to  0.000000
1/15/2013	9:56:37 AM	Bypass solenoid MFC set to  0.000000
1/15/2013	9:56:37 AM	Tube furnace set to 750
1/15/2013	10:01:37 AM	H2 valve closed
1/15/2013	10:01:37 AM	BCl3 valve closed
1/15/2013	10:01:37 AM	PH3 valve closed
1/15/2013	10:01:37 AM	SiCl4 pre valve closed
1/15/2013	10:01:37 AM	SiCl4 post valve closed
1/15/2013	10:01:37 AM	Main Vac valve closed
1/15/2013	10:01:37 AM	Bypass valve closed
1/15/2013	10:01:37 AM	Helium valve opened
1/15/2013	10:01:37 AM	Bubbler valve opened
1/15/2013	10:01:37 AM	Helium MFC set to  500.000000
1/15/2013	10:01:37 AM	H2 MFC set to  0.000000
1/15/2013	10:01:37 AM	BCl3 MFC set to  0.000000
1/15/2013	10:01:37 AM	PH3 MFC set to  0.000000
1/15/2013	10:01:37 AM	SiCl4 MFC set to  0.000000
1/15/2013	10:01:37 AM	Bypass solenoid MFC set to  0.000000
1/15/2013	10:01:37 AM	Tube furnace set to 0
1/15/2013	10:21:37 AM	Helium valve closed
1/15/2013	10:21:37 AM	H2 valve closed
1/15/2013	10:21:37 AM	BCl3 valve closed
1/15/2013	10:21:37 AM	PH3 valve closed
1/15/2013	10:21:37 AM	SiCl4 pre valve closed
1/15/2013	10:21:37 AM	SiCl4 post valve closed
1/15/2013	10:21:37 AM	Main Vac valve closed
1/15/2013	10:21:37 AM	Bypass valve closed
1/15/2013	10:21:37 AM	Bubbler valve closed
1/15/2013	10:21:37 AM	Helium MFC set to  0.000000
1/15/2013	10:21:37 AM	H2 MFC set to  0.000000
1/15/2013	10:21:37 AM	BCl3 MFC set to  0.000000
1/15/2013	10:21:37 AM	PH3 MFC set to  0.000000
1/15/2013	10:21:37 AM	SiCl4 MFC set to  0.000000
1/15/2013	10:21:37 AM	Bypass solenoid MFC set to  0.000000
1/15/2013	10:21:37 AM	Tube furnace set to 0
1/15/2013	10:21:38 AM	Run finished at 10:21 AM
1/15/2013	1:22:42 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/15/2013	1:22:43 PM	Recipe started at 1:22 PM
1/15/2013	1:22:43 PM	Helium valve closed
1/15/2013	1:22:43 PM	H2 valve closed
1/15/2013	1:22:43 PM	BCl3 valve closed
1/15/2013	1:22:43 PM	PH3 valve closed
1/15/2013	1:22:43 PM	SiCl4 pre valve closed
1/15/2013	1:22:43 PM	SiCl4 post valve closed
1/15/2013	1:22:43 PM	Main Vac valve closed
1/15/2013	1:22:43 PM	Bypass valve closed
1/15/2013	1:22:43 PM	Bubbler valve closed
1/15/2013	1:22:43 PM	Helium MFC set to  0.000000
1/15/2013	1:22:43 PM	H2 MFC set to  0.000000
1/15/2013	1:22:43 PM	BCl3 MFC set to  0.000000
1/15/2013	1:22:43 PM	PH3 MFC set to  0.000000
1/15/2013	1:22:43 PM	SiCl4 MFC set to  0.000000
1/15/2013	1:22:43 PM	Bypass solenoid MFC set to  0.000000
1/15/2013	1:22:43 PM	Tube furnace set to 0
1/15/2013	1:22:46 PM	H2 valve closed
1/15/2013	1:22:46 PM	BCl3 valve closed
1/15/2013	1:22:46 PM	PH3 valve closed
1/15/2013	1:22:46 PM	SiCl4 pre valve closed
1/15/2013	1:22:46 PM	SiCl4 post valve closed
1/15/2013	1:22:46 PM	Main Vac valve closed
1/15/2013	1:22:46 PM	Bypass valve closed
1/15/2013	1:22:46 PM	Bubbler valve closed
1/15/2013	1:22:46 PM	Helium valve opened
1/15/2013	1:22:46 PM	Helium MFC set to  500.000000
1/15/2013	1:22:46 PM	H2 MFC set to  0.000000
1/15/2013	1:22:46 PM	BCl3 MFC set to  0.000000
1/15/2013	1:22:46 PM	PH3 MFC set to  0.000000
1/15/2013	1:22:46 PM	SiCl4 MFC set to  0.000000
1/15/2013	1:22:46 PM	Bypass solenoid MFC set to  0.000000
1/15/2013	1:22:46 PM	Tube furnace set to 0
1/15/2013	1:22:48 PM	Helium valve closed
1/15/2013	1:22:48 PM	H2 valve closed
1/15/2013	1:22:48 PM	BCl3 valve closed
1/15/2013	1:22:48 PM	PH3 valve closed
1/15/2013	1:22:48 PM	SiCl4 pre valve closed
1/15/2013	1:22:48 PM	SiCl4 post valve closed
1/15/2013	1:22:48 PM	Main Vac valve closed
1/15/2013	1:22:48 PM	Bypass valve closed
1/15/2013	1:22:48 PM	Bubbler valve closed
1/15/2013	1:22:48 PM	Helium MFC set to  0.000000
1/15/2013	1:22:48 PM	H2 MFC set to  0.000000
1/15/2013	1:22:48 PM	BCl3 MFC set to  0.000000
1/15/2013	1:22:48 PM	PH3 MFC set to  0.000000
1/15/2013	1:22:48 PM	SiCl4 MFC set to  0.000000
1/15/2013	1:22:48 PM	Bypass solenoid MFC set to  0.000000
1/15/2013	1:22:49 PM	Tube furnace set to 0
1/15/2013	1:22:50 PM	Run finished at 1:22 PM
1/15/2013	1:22:50 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/15/2013	1:26:47 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/15/2013	1:26:48 PM	Recipe started at 1:26 PM
1/15/2013	1:26:48 PM	Helium valve closed
1/15/2013	1:26:48 PM	H2 valve closed
1/15/2013	1:26:48 PM	BCl3 valve closed
1/15/2013	1:26:48 PM	PH3 valve closed
1/15/2013	1:26:48 PM	SiCl4 pre valve closed
1/15/2013	1:26:48 PM	SiCl4 post valve closed
1/15/2013	1:26:48 PM	Main Vac valve closed
1/15/2013	1:26:48 PM	Bubbler valve closed
1/15/2013	1:26:48 PM	Bypass valve opened
1/15/2013	1:26:48 PM	Helium MFC set to  0.000000
1/15/2013	1:26:48 PM	H2 MFC set to  0.000000
1/15/2013	1:26:48 PM	BCl3 MFC set to  0.000000
1/15/2013	1:26:48 PM	PH3 MFC set to  0.000000
1/15/2013	1:26:48 PM	SiCl4 MFC set to  0.000000
1/15/2013	1:26:48 PM	Bypass solenoid MFC set to  0.000000
1/15/2013	1:26:48 PM	Tube furnace set to 0
1/15/2013	1:28:10 PM	Helium valve closed
1/15/2013	1:28:10 PM	H2 valve closed
1/15/2013	1:28:10 PM	BCl3 valve closed
1/15/2013	1:28:10 PM	PH3 valve closed
1/15/2013	1:28:10 PM	SiCl4 pre valve closed
1/15/2013	1:28:10 PM	SiCl4 post valve closed
1/15/2013	1:28:10 PM	Main Vac valve closed
1/15/2013	1:28:10 PM	Bubbler valve closed
1/15/2013	1:28:10 PM	Bypass valve opened
1/15/2013	1:28:10 PM	Helium MFC set to  0.000000
1/15/2013	1:28:10 PM	H2 MFC set to  0.000000
1/15/2013	1:28:10 PM	BCl3 MFC set to  0.000000
1/15/2013	1:28:10 PM	PH3 MFC set to  0.000000
1/15/2013	1:28:10 PM	SiCl4 MFC set to  0.000000
1/15/2013	1:28:10 PM	Bypass solenoid MFC set to  0.000000
1/15/2013	1:28:10 PM	Tube furnace set to 0
1/15/2013	1:29:10 PM	Helium valve closed
1/15/2013	1:29:10 PM	H2 valve closed
1/15/2013	1:29:10 PM	BCl3 valve closed
1/15/2013	1:29:10 PM	PH3 valve closed
1/15/2013	1:29:10 PM	SiCl4 pre valve closed
1/15/2013	1:29:10 PM	SiCl4 post valve closed
1/15/2013	1:29:10 PM	Bypass valve closed
1/15/2013	1:29:10 PM	Bubbler valve closed
1/15/2013	1:29:10 PM	Main Vac valve opened
1/15/2013	1:29:10 PM	Helium MFC set to  0.000000
1/15/2013	1:29:10 PM	H2 MFC set to  0.000000
1/15/2013	1:29:10 PM	BCl3 MFC set to  0.000000
1/15/2013	1:29:10 PM	PH3 MFC set to  0.000000
1/15/2013	1:29:10 PM	SiCl4 MFC set to  0.000000
1/15/2013	1:29:10 PM	Bypass solenoid MFC set to  0.000000
1/15/2013	1:29:10 PM	Tube furnace set to 0
1/15/2013	1:29:11 PM	Run finished at 1:29 PM
1/15/2013	1:29:11 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/15/2013	2:06:05 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
1/15/2013	2:06:11 PM	Recipe started at 2:06 PM
1/15/2013	2:06:11 PM	Helium valve closed
1/15/2013	2:06:11 PM	H2 valve closed
1/15/2013	2:06:11 PM	BCl3 valve closed
1/15/2013	2:06:11 PM	PH3 valve closed
1/15/2013	2:06:11 PM	SiCl4 pre valve closed
1/15/2013	2:06:11 PM	SiCl4 post valve closed
1/15/2013	2:06:11 PM	Main Vac valve closed
1/15/2013	2:06:11 PM	Bubbler valve closed
1/15/2013	2:06:11 PM	Bypass valve opened
1/15/2013	2:06:11 PM	Helium MFC set to  0.000000
1/15/2013	2:06:11 PM	H2 MFC set to  0.000000
1/15/2013	2:06:11 PM	BCl3 MFC set to  0.000000
1/15/2013	2:06:11 PM	PH3 MFC set to  0.000000
1/15/2013	2:06:11 PM	SiCl4 MFC set to  0.000000
1/15/2013	2:06:11 PM	Bypass solenoid MFC set to  0.000000
1/15/2013	2:06:11 PM	Tube furnace set to 0
1/15/2013	2:06:12 PM	Helium valve closed
1/15/2013	2:06:12 PM	H2 valve closed
1/15/2013	2:06:12 PM	BCl3 valve closed
1/15/2013	2:06:12 PM	PH3 valve closed
1/15/2013	2:06:12 PM	SiCl4 pre valve closed
1/15/2013	2:06:12 PM	SiCl4 post valve closed
1/15/2013	2:06:12 PM	Main Vac valve closed
1/15/2013	2:06:12 PM	Bubbler valve closed
1/15/2013	2:06:12 PM	Bypass valve opened
1/15/2013	2:06:12 PM	Helium MFC set to  0.000000
1/15/2013	2:06:12 PM	H2 MFC set to  0.000000
1/15/2013	2:06:12 PM	BCl3 MFC set to  0.000000
1/15/2013	2:06:12 PM	PH3 MFC set to  0.000000
1/15/2013	2:06:12 PM	SiCl4 MFC set to  0.000000
1/15/2013	2:06:12 PM	Bypass solenoid MFC set to  0.000000
1/15/2013	2:06:12 PM	Tube furnace set to 0
1/15/2013	2:06:14 PM	Helium valve closed
1/15/2013	2:06:14 PM	H2 valve closed
1/15/2013	2:06:14 PM	BCl3 valve closed
1/15/2013	2:06:14 PM	PH3 valve closed
1/15/2013	2:06:14 PM	SiCl4 pre valve closed
1/15/2013	2:06:14 PM	SiCl4 post valve closed
1/15/2013	2:06:14 PM	Bypass valve closed
1/15/2013	2:06:14 PM	Bubbler valve closed
1/15/2013	2:06:14 PM	Main Vac valve opened
1/15/2013	2:06:14 PM	Helium MFC set to  0.000000
1/15/2013	2:06:14 PM	H2 MFC set to  0.000000
1/15/2013	2:06:14 PM	BCl3 MFC set to  0.000000
1/15/2013	2:06:14 PM	PH3 MFC set to  0.000000
1/15/2013	2:06:14 PM	SiCl4 MFC set to  0.000000
1/15/2013	2:06:14 PM	Bypass solenoid MFC set to  0.000000
1/15/2013	2:06:14 PM	Tube furnace set to 0
1/15/2013	2:06:44 PM	H2 valve closed
1/15/2013	2:06:44 PM	BCl3 valve closed
1/15/2013	2:06:44 PM	PH3 valve closed
1/15/2013	2:06:44 PM	SiCl4 pre valve closed
1/15/2013	2:06:44 PM	SiCl4 post valve closed
1/15/2013	2:06:44 PM	Bypass valve closed
1/15/2013	2:06:44 PM	Bubbler valve closed
1/15/2013	2:06:44 PM	Helium valve opened
1/15/2013	2:06:44 PM	Main Vac valve opened
1/15/2013	2:06:44 PM	Helium MFC set to  20.000000
1/15/2013	2:06:44 PM	H2 MFC set to  0.000000
1/15/2013	2:06:44 PM	BCl3 MFC set to  0.000000
1/15/2013	2:06:44 PM	PH3 MFC set to  0.000000
1/15/2013	2:06:44 PM	SiCl4 MFC set to  0.000000
1/15/2013	2:06:44 PM	Bypass solenoid MFC set to  0.000000
1/15/2013	2:06:44 PM	Tube furnace set to 0
1/15/2013	2:07:14 PM	Helium valve closed
1/15/2013	2:07:14 PM	H2 valve closed
1/15/2013	2:07:14 PM	BCl3 valve closed
1/15/2013	2:07:14 PM	PH3 valve closed
1/15/2013	2:07:14 PM	SiCl4 pre valve closed
1/15/2013	2:07:14 PM	SiCl4 post valve closed
1/15/2013	2:07:14 PM	Bypass valve closed
1/15/2013	2:07:14 PM	Bubbler valve closed
1/15/2013	2:07:14 PM	Main Vac valve opened
1/15/2013	2:07:14 PM	Helium MFC set to  0.000000
1/15/2013	2:07:14 PM	H2 MFC set to  0.000000
1/15/2013	2:07:14 PM	BCl3 MFC set to  0.000000
1/15/2013	2:07:14 PM	PH3 MFC set to  0.000000
1/15/2013	2:07:14 PM	SiCl4 MFC set to  0.000000
1/15/2013	2:07:14 PM	Bypass solenoid MFC set to  0.000000
1/15/2013	2:07:14 PM	Tube furnace set to 0
1/15/2013	2:07:44 PM	H2 valve closed
1/15/2013	2:07:44 PM	BCl3 valve closed
1/15/2013	2:07:44 PM	PH3 valve closed
1/15/2013	2:07:44 PM	SiCl4 pre valve closed
1/15/2013	2:07:44 PM	SiCl4 post valve closed
1/15/2013	2:07:44 PM	Bypass valve closed
1/15/2013	2:07:44 PM	Bubbler valve closed
1/15/2013	2:07:44 PM	Helium valve opened
1/15/2013	2:07:44 PM	Main Vac valve opened
1/15/2013	2:07:44 PM	Helium MFC set to  20.000000
1/15/2013	2:07:44 PM	H2 MFC set to  0.000000
1/15/2013	2:07:44 PM	BCl3 MFC set to  0.000000
1/15/2013	2:07:44 PM	PH3 MFC set to  0.000000
1/15/2013	2:07:44 PM	SiCl4 MFC set to  0.000000
1/15/2013	2:07:44 PM	Bypass solenoid MFC set to  0.000000
1/15/2013	2:07:45 PM	Tube furnace set to 0
1/15/2013	2:08:15 PM	Helium valve closed
1/15/2013	2:08:15 PM	H2 valve closed
1/15/2013	2:08:15 PM	BCl3 valve closed
1/15/2013	2:08:15 PM	PH3 valve closed
1/15/2013	2:08:15 PM	SiCl4 pre valve closed
1/15/2013	2:08:15 PM	SiCl4 post valve closed
1/15/2013	2:08:15 PM	Bypass valve closed
1/15/2013	2:08:15 PM	Bubbler valve closed
1/15/2013	2:08:15 PM	Main Vac valve opened
1/15/2013	2:08:15 PM	Helium MFC set to  0.000000
1/15/2013	2:08:15 PM	H2 MFC set to  0.000000
1/15/2013	2:08:15 PM	BCl3 MFC set to  0.000000
1/15/2013	2:08:15 PM	PH3 MFC set to  0.000000
1/15/2013	2:08:15 PM	SiCl4 MFC set to  0.000000
1/15/2013	2:08:15 PM	Bypass solenoid MFC set to  0.000000
1/15/2013	2:08:15 PM	Tube furnace set to 0
1/15/2013	2:08:45 PM	H2 valve closed
1/15/2013	2:08:45 PM	BCl3 valve closed
1/15/2013	2:08:45 PM	PH3 valve closed
1/15/2013	2:08:45 PM	SiCl4 pre valve closed
1/15/2013	2:08:45 PM	SiCl4 post valve closed
1/15/2013	2:08:45 PM	Bypass valve closed
1/15/2013	2:08:45 PM	Bubbler valve closed
1/15/2013	2:08:45 PM	Helium valve opened
1/15/2013	2:08:45 PM	Main Vac valve opened
1/15/2013	2:08:45 PM	Helium MFC set to  20.000000
1/15/2013	2:08:45 PM	H2 MFC set to  0.000000
1/15/2013	2:08:45 PM	BCl3 MFC set to  0.000000
1/15/2013	2:08:45 PM	PH3 MFC set to  0.000000
1/15/2013	2:08:45 PM	SiCl4 MFC set to  0.000000
1/15/2013	2:08:45 PM	Bypass solenoid MFC set to  0.000000
1/15/2013	2:08:45 PM	Tube furnace set to 0
1/15/2013	2:09:15 PM	Helium valve closed
1/15/2013	2:09:15 PM	H2 valve closed
1/15/2013	2:09:15 PM	BCl3 valve closed
1/15/2013	2:09:15 PM	PH3 valve closed
1/15/2013	2:09:15 PM	SiCl4 pre valve closed
1/15/2013	2:09:15 PM	SiCl4 post valve closed
1/15/2013	2:09:15 PM	Bypass valve closed
1/15/2013	2:09:15 PM	Bubbler valve closed
1/15/2013	2:09:15 PM	Main Vac valve opened
1/15/2013	2:09:15 PM	Helium MFC set to  0.000000
1/15/2013	2:09:15 PM	H2 MFC set to  0.000000
1/15/2013	2:09:15 PM	BCl3 MFC set to  0.000000
1/15/2013	2:09:15 PM	PH3 MFC set to  0.000000
1/15/2013	2:09:15 PM	SiCl4 MFC set to  0.000000
1/15/2013	2:09:15 PM	Bypass solenoid MFC set to  0.000000
1/15/2013	2:09:15 PM	Tube furnace set to 0
1/15/2013	2:09:45 PM	H2 valve closed
1/15/2013	2:09:45 PM	BCl3 valve closed
1/15/2013	2:09:45 PM	PH3 valve closed
1/15/2013	2:09:45 PM	SiCl4 pre valve closed
1/15/2013	2:09:45 PM	SiCl4 post valve closed
1/15/2013	2:09:45 PM	Bypass valve closed
1/15/2013	2:09:45 PM	Bubbler valve closed
1/15/2013	2:09:45 PM	Helium valve opened
1/15/2013	2:09:45 PM	Main Vac valve opened
1/15/2013	2:09:45 PM	Helium MFC set to  20.000000
1/15/2013	2:09:45 PM	H2 MFC set to  0.000000
1/15/2013	2:09:45 PM	BCl3 MFC set to  0.000000
1/15/2013	2:09:45 PM	PH3 MFC set to  0.000000
1/15/2013	2:09:45 PM	SiCl4 MFC set to  0.000000
1/15/2013	2:09:45 PM	Bypass solenoid MFC set to  0.000000
1/15/2013	2:09:46 PM	Tube furnace set to 0
1/15/2013	2:10:16 PM	Helium valve closed
1/15/2013	2:10:16 PM	H2 valve closed
1/15/2013	2:10:16 PM	BCl3 valve closed
1/15/2013	2:10:16 PM	PH3 valve closed
1/15/2013	2:10:16 PM	SiCl4 pre valve closed
1/15/2013	2:10:16 PM	SiCl4 post valve closed
1/15/2013	2:10:16 PM	Bypass valve closed
1/15/2013	2:10:16 PM	Bubbler valve closed
1/15/2013	2:10:16 PM	Main Vac valve opened
1/15/2013	2:10:16 PM	Helium MFC set to  0.000000
1/15/2013	2:10:16 PM	H2 MFC set to  0.000000
1/15/2013	2:10:16 PM	BCl3 MFC set to  0.000000
1/15/2013	2:10:16 PM	PH3 MFC set to  0.000000
1/15/2013	2:10:16 PM	SiCl4 MFC set to  0.000000
1/15/2013	2:10:16 PM	Bypass solenoid MFC set to  0.000000
1/15/2013	2:10:16 PM	Tube furnace set to 0
1/15/2013	2:10:46 PM	H2 valve closed
1/15/2013	2:10:46 PM	BCl3 valve closed
1/15/2013	2:10:46 PM	PH3 valve closed
1/15/2013	2:10:46 PM	SiCl4 pre valve closed
1/15/2013	2:10:46 PM	SiCl4 post valve closed
1/15/2013	2:10:46 PM	Bypass valve closed
1/15/2013	2:10:46 PM	Bubbler valve closed
1/15/2013	2:10:46 PM	Helium valve opened
1/15/2013	2:10:46 PM	Main Vac valve opened
1/15/2013	2:10:46 PM	Helium MFC set to  20.000000
1/15/2013	2:10:46 PM	H2 MFC set to  0.000000
1/15/2013	2:10:46 PM	BCl3 MFC set to  0.000000
1/15/2013	2:10:46 PM	PH3 MFC set to  0.000000
1/15/2013	2:10:46 PM	SiCl4 MFC set to  0.000000
1/15/2013	2:10:46 PM	Bypass solenoid MFC set to  0.000000
1/15/2013	2:10:46 PM	Tube furnace set to 0
1/15/2013	2:11:16 PM	Helium valve closed
1/15/2013	2:11:16 PM	H2 valve closed
1/15/2013	2:11:16 PM	BCl3 valve closed
1/15/2013	2:11:16 PM	PH3 valve closed
1/15/2013	2:11:16 PM	SiCl4 pre valve closed
1/15/2013	2:11:16 PM	SiCl4 post valve closed
1/15/2013	2:11:16 PM	Bypass valve closed
1/15/2013	2:11:16 PM	Bubbler valve closed
1/15/2013	2:11:16 PM	Main Vac valve opened
1/15/2013	2:11:16 PM	Helium MFC set to  0.000000
1/15/2013	2:11:16 PM	H2 MFC set to  0.000000
1/15/2013	2:11:16 PM	BCl3 MFC set to  0.000000
1/15/2013	2:11:16 PM	PH3 MFC set to  0.000000
1/15/2013	2:11:16 PM	SiCl4 MFC set to  0.000000
1/15/2013	2:11:16 PM	Bypass solenoid MFC set to  0.000000
1/15/2013	2:11:16 PM	Tube furnace set to 0
1/15/2013	2:11:46 PM	H2 valve closed
1/15/2013	2:11:46 PM	BCl3 valve closed
1/15/2013	2:11:46 PM	PH3 valve closed
1/15/2013	2:11:46 PM	SiCl4 pre valve closed
1/15/2013	2:11:46 PM	SiCl4 post valve closed
1/15/2013	2:11:46 PM	Bypass valve closed
1/15/2013	2:11:46 PM	Bubbler valve closed
1/15/2013	2:11:46 PM	Helium valve opened
1/15/2013	2:11:46 PM	Main Vac valve opened
1/15/2013	2:11:46 PM	Helium MFC set to  20.000000
1/15/2013	2:11:46 PM	H2 MFC set to  0.000000
1/15/2013	2:11:46 PM	BCl3 MFC set to  0.000000
1/15/2013	2:11:46 PM	PH3 MFC set to  0.000000
1/15/2013	2:11:46 PM	SiCl4 MFC set to  0.000000
1/15/2013	2:11:46 PM	Bypass solenoid MFC set to  0.000000
1/15/2013	2:11:47 PM	Tube furnace set to 0
1/15/2013	2:12:17 PM	Helium valve closed
1/15/2013	2:12:17 PM	H2 valve closed
1/15/2013	2:12:17 PM	BCl3 valve closed
1/15/2013	2:12:17 PM	PH3 valve closed
1/15/2013	2:12:17 PM	SiCl4 pre valve closed
1/15/2013	2:12:17 PM	SiCl4 post valve closed
1/15/2013	2:12:17 PM	Bypass valve closed
1/15/2013	2:12:17 PM	Bubbler valve closed
1/15/2013	2:12:17 PM	Main Vac valve opened
1/15/2013	2:12:17 PM	Helium MFC set to  0.000000
1/15/2013	2:12:17 PM	H2 MFC set to  0.000000
1/15/2013	2:12:17 PM	BCl3 MFC set to  0.000000
1/15/2013	2:12:17 PM	PH3 MFC set to  0.000000
1/15/2013	2:12:17 PM	SiCl4 MFC set to  0.000000
1/15/2013	2:12:17 PM	Bypass solenoid MFC set to  0.000000
1/15/2013	2:12:17 PM	Tube furnace set to 0
1/15/2013	2:12:47 PM	H2 valve closed
1/15/2013	2:12:47 PM	BCl3 valve closed
1/15/2013	2:12:47 PM	PH3 valve closed
1/15/2013	2:12:47 PM	SiCl4 pre valve closed
1/15/2013	2:12:47 PM	SiCl4 post valve closed
1/15/2013	2:12:47 PM	Bypass valve closed
1/15/2013	2:12:47 PM	Bubbler valve closed
1/15/2013	2:12:47 PM	Helium valve opened
1/15/2013	2:12:47 PM	Main Vac valve opened
1/15/2013	2:12:47 PM	Helium MFC set to  20.000000
1/15/2013	2:12:47 PM	H2 MFC set to  0.000000
1/15/2013	2:12:47 PM	BCl3 MFC set to  0.000000
1/15/2013	2:12:47 PM	PH3 MFC set to  0.000000
1/15/2013	2:12:47 PM	SiCl4 MFC set to  0.000000
1/15/2013	2:12:47 PM	Bypass solenoid MFC set to  0.000000
1/15/2013	2:12:47 PM	Tube furnace set to 0
1/15/2013	2:13:17 PM	Helium valve closed
1/15/2013	2:13:17 PM	H2 valve closed
1/15/2013	2:13:17 PM	BCl3 valve closed
1/15/2013	2:13:17 PM	PH3 valve closed
1/15/2013	2:13:17 PM	SiCl4 pre valve closed
1/15/2013	2:13:17 PM	SiCl4 post valve closed
1/15/2013	2:13:17 PM	Bypass valve closed
1/15/2013	2:13:17 PM	Bubbler valve closed
1/15/2013	2:13:17 PM	Main Vac valve opened
1/15/2013	2:13:17 PM	Helium MFC set to  0.000000
1/15/2013	2:13:17 PM	H2 MFC set to  0.000000
1/15/2013	2:13:17 PM	BCl3 MFC set to  0.000000
1/15/2013	2:13:17 PM	PH3 MFC set to  0.000000
1/15/2013	2:13:17 PM	SiCl4 MFC set to  0.000000
1/15/2013	2:13:17 PM	Bypass solenoid MFC set to  0.000000
1/15/2013	2:13:17 PM	Tube furnace set to 0
1/15/2013	2:13:47 PM	H2 valve closed
1/15/2013	2:13:47 PM	BCl3 valve closed
1/15/2013	2:13:47 PM	PH3 valve closed
1/15/2013	2:13:47 PM	SiCl4 pre valve closed
1/15/2013	2:13:47 PM	SiCl4 post valve closed
1/15/2013	2:13:47 PM	Bypass valve closed
1/15/2013	2:13:47 PM	Bubbler valve closed
1/15/2013	2:13:47 PM	Helium valve opened
1/15/2013	2:13:47 PM	Main Vac valve opened
1/15/2013	2:13:47 PM	Helium MFC set to  20.000000
1/15/2013	2:13:47 PM	H2 MFC set to  0.000000
1/15/2013	2:13:47 PM	BCl3 MFC set to  0.000000
1/15/2013	2:13:47 PM	PH3 MFC set to  0.000000
1/15/2013	2:13:47 PM	SiCl4 MFC set to  0.000000
1/15/2013	2:13:47 PM	Bypass solenoid MFC set to  0.000000
1/15/2013	2:13:48 PM	Tube furnace set to 0
1/15/2013	2:14:18 PM	Helium valve closed
1/15/2013	2:14:18 PM	H2 valve closed
1/15/2013	2:14:18 PM	BCl3 valve closed
1/15/2013	2:14:18 PM	PH3 valve closed
1/15/2013	2:14:18 PM	SiCl4 pre valve closed
1/15/2013	2:14:18 PM	SiCl4 post valve closed
1/15/2013	2:14:18 PM	Bypass valve closed
1/15/2013	2:14:18 PM	Bubbler valve closed
1/15/2013	2:14:18 PM	Main Vac valve opened
1/15/2013	2:14:18 PM	Helium MFC set to  0.000000
1/15/2013	2:14:18 PM	H2 MFC set to  0.000000
1/15/2013	2:14:18 PM	BCl3 MFC set to  0.000000
1/15/2013	2:14:18 PM	PH3 MFC set to  0.000000
1/15/2013	2:14:18 PM	SiCl4 MFC set to  0.000000
1/15/2013	2:14:18 PM	Bypass solenoid MFC set to  0.000000
1/15/2013	2:14:18 PM	Tube furnace set to 0
1/15/2013	2:14:48 PM	H2 valve closed
1/15/2013	2:14:48 PM	BCl3 valve closed
1/15/2013	2:14:48 PM	PH3 valve closed
1/15/2013	2:14:48 PM	SiCl4 pre valve closed
1/15/2013	2:14:48 PM	SiCl4 post valve closed
1/15/2013	2:14:48 PM	Bypass valve closed
1/15/2013	2:14:48 PM	Bubbler valve closed
1/15/2013	2:14:48 PM	Helium valve opened
1/15/2013	2:14:48 PM	Main Vac valve opened
1/15/2013	2:14:48 PM	Helium MFC set to  20.000000
1/15/2013	2:14:48 PM	H2 MFC set to  0.000000
1/15/2013	2:14:48 PM	BCl3 MFC set to  0.000000
1/15/2013	2:14:48 PM	PH3 MFC set to  0.000000
1/15/2013	2:14:48 PM	SiCl4 MFC set to  0.000000
1/15/2013	2:14:48 PM	Bypass solenoid MFC set to  0.000000
1/15/2013	2:14:48 PM	Tube furnace set to 0
1/15/2013	2:15:18 PM	Helium valve closed
1/15/2013	2:15:18 PM	H2 valve closed
1/15/2013	2:15:18 PM	BCl3 valve closed
1/15/2013	2:15:18 PM	PH3 valve closed
1/15/2013	2:15:18 PM	SiCl4 pre valve closed
1/15/2013	2:15:18 PM	SiCl4 post valve closed
1/15/2013	2:15:18 PM	Bypass valve closed
1/15/2013	2:15:18 PM	Bubbler valve closed
1/15/2013	2:15:18 PM	Main Vac valve opened
1/15/2013	2:15:18 PM	Helium MFC set to  0.000000
1/15/2013	2:15:18 PM	H2 MFC set to  0.000000
1/15/2013	2:15:18 PM	BCl3 MFC set to  0.000000
1/15/2013	2:15:18 PM	PH3 MFC set to  0.000000
1/15/2013	2:15:18 PM	SiCl4 MFC set to  0.000000
1/15/2013	2:15:18 PM	Bypass solenoid MFC set to  0.000000
1/15/2013	2:15:18 PM	Tube furnace set to 0
1/15/2013	2:15:48 PM	H2 valve closed
1/15/2013	2:15:48 PM	BCl3 valve closed
1/15/2013	2:15:48 PM	PH3 valve closed
1/15/2013	2:15:48 PM	SiCl4 pre valve closed
1/15/2013	2:15:48 PM	SiCl4 post valve closed
1/15/2013	2:15:48 PM	Bypass valve closed
1/15/2013	2:15:48 PM	Bubbler valve closed
1/15/2013	2:15:48 PM	Helium valve opened
1/15/2013	2:15:48 PM	Main Vac valve opened
1/15/2013	2:15:48 PM	Helium MFC set to  20.000000
1/15/2013	2:15:48 PM	H2 MFC set to  0.000000
1/15/2013	2:15:48 PM	BCl3 MFC set to  0.000000
1/15/2013	2:15:48 PM	PH3 MFC set to  0.000000
1/15/2013	2:15:48 PM	SiCl4 MFC set to  0.000000
1/15/2013	2:15:48 PM	Bypass solenoid MFC set to  0.000000
1/15/2013	2:15:49 PM	Tube furnace set to 0
1/15/2013	2:16:19 PM	Helium valve closed
1/15/2013	2:16:19 PM	H2 valve closed
1/15/2013	2:16:19 PM	BCl3 valve closed
1/15/2013	2:16:19 PM	PH3 valve closed
1/15/2013	2:16:19 PM	SiCl4 pre valve closed
1/15/2013	2:16:19 PM	SiCl4 post valve closed
1/15/2013	2:16:19 PM	Bypass valve closed
1/15/2013	2:16:19 PM	Bubbler valve closed
1/15/2013	2:16:19 PM	Main Vac valve opened
1/15/2013	2:16:19 PM	Helium MFC set to  0.000000
1/15/2013	2:16:19 PM	H2 MFC set to  0.000000
1/15/2013	2:16:19 PM	BCl3 MFC set to  0.000000
1/15/2013	2:16:19 PM	PH3 MFC set to  0.000000
1/15/2013	2:16:19 PM	SiCl4 MFC set to  0.000000
1/15/2013	2:16:19 PM	Bypass solenoid MFC set to  0.000000
1/15/2013	2:16:19 PM	Tube furnace set to 0
1/15/2013	2:16:20 PM	Run finished at 2:16 PM
1/15/2013	2:16:20 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
1/15/2013	2:28:40 PM	Main Vac valve closed
1/15/2013	2:28:53 PM	Main Vac valve opened
1/15/2013	2:29:33 PM	Recipe started at 2:29 PM
1/15/2013	2:29:33 PM	Helium valve closed
1/15/2013	2:29:33 PM	H2 valve closed
1/15/2013	2:29:33 PM	BCl3 valve closed
1/15/2013	2:29:33 PM	PH3 valve closed
1/15/2013	2:29:33 PM	SiCl4 pre valve closed
1/15/2013	2:29:33 PM	SiCl4 post valve closed
1/15/2013	2:29:33 PM	Main Vac valve closed
1/15/2013	2:29:33 PM	Bypass valve closed
1/15/2013	2:29:33 PM	Bubbler valve closed
1/15/2013	2:29:33 PM	Helium MFC set to  0.000000
1/15/2013	2:29:33 PM	H2 MFC set to  0.000000
1/15/2013	2:29:33 PM	BCl3 MFC set to  0.000000
1/15/2013	2:29:33 PM	PH3 MFC set to  0.000000
1/15/2013	2:29:33 PM	SiCl4 MFC set to  0.000000
1/15/2013	2:29:33 PM	Bypass solenoid MFC set to  0.000000
1/15/2013	2:29:33 PM	Tube furnace set to 0
1/15/2013	2:29:36 PM	Helium valve closed
1/15/2013	2:29:36 PM	BCl3 valve closed
1/15/2013	2:29:36 PM	PH3 valve closed
1/15/2013	2:29:36 PM	SiCl4 pre valve closed
1/15/2013	2:29:36 PM	SiCl4 post valve closed
1/15/2013	2:29:36 PM	Main Vac valve closed
1/15/2013	2:29:36 PM	Bypass valve closed
1/15/2013	2:29:36 PM	Bubbler valve closed
1/15/2013	2:29:36 PM	H2 valve opened
1/15/2013	2:29:36 PM	Helium MFC set to  0.000000
1/15/2013	2:29:36 PM	H2 MFC set to  500.000000
1/15/2013	2:29:36 PM	BCl3 MFC set to  0.000000
1/15/2013	2:29:36 PM	PH3 MFC set to  0.000000
1/15/2013	2:29:36 PM	SiCl4 MFC set to  0.000000
1/15/2013	2:29:36 PM	Bypass solenoid MFC set to  0.000000
1/15/2013	2:29:36 PM	Tube furnace set to 0
1/15/2013	2:30:53 PM	Helium valve closed
1/15/2013	2:30:53 PM	BCl3 valve closed
1/15/2013	2:30:53 PM	PH3 valve closed
1/15/2013	2:30:53 PM	SiCl4 pre valve closed
1/15/2013	2:30:53 PM	SiCl4 post valve closed
1/15/2013	2:30:53 PM	Main Vac valve closed
1/15/2013	2:30:53 PM	Bypass valve closed
1/15/2013	2:30:53 PM	H2 valve opened
1/15/2013	2:30:53 PM	Bubbler valve opened
1/15/2013	2:30:53 PM	Helium MFC set to  0.000000
1/15/2013	2:30:53 PM	H2 MFC set to  500.000000
1/15/2013	2:30:53 PM	BCl3 MFC set to  0.000000
1/15/2013	2:30:53 PM	PH3 MFC set to  0.000000
1/15/2013	2:30:53 PM	SiCl4 MFC set to  0.000000
1/15/2013	2:30:53 PM	Bypass solenoid MFC set to  0.000000
1/15/2013	2:30:53 PM	Tube furnace set to 0
1/15/2013	2:30:54 PM	Helium valve closed
1/15/2013	2:30:54 PM	BCl3 valve closed
1/15/2013	2:30:54 PM	PH3 valve closed
1/15/2013	2:30:54 PM	SiCl4 pre valve closed
1/15/2013	2:30:54 PM	SiCl4 post valve closed
1/15/2013	2:30:54 PM	Main Vac valve closed
1/15/2013	2:30:54 PM	Bypass valve closed
1/15/2013	2:30:54 PM	H2 valve opened
1/15/2013	2:30:54 PM	Bubbler valve opened
1/15/2013	2:30:54 PM	Helium MFC set to  0.000000
1/15/2013	2:30:54 PM	H2 MFC set to  500.000000
1/15/2013	2:30:54 PM	BCl3 MFC set to  0.000000
1/15/2013	2:30:54 PM	PH3 MFC set to  0.000000
1/15/2013	2:30:54 PM	SiCl4 MFC set to  0.000000
1/15/2013	2:30:54 PM	Bypass solenoid MFC set to  0.000000
1/15/2013	2:30:54 PM	Tube furnace set to 1000
1/15/2013	2:50:54 PM	Helium valve closed
1/15/2013	2:50:54 PM	PH3 valve closed
1/15/2013	2:50:54 PM	Main Vac valve closed
1/15/2013	2:50:54 PM	Bypass valve closed
1/15/2013	2:50:54 PM	H2 valve opened
1/15/2013	2:50:54 PM	BCl3 valve opened
1/15/2013	2:50:54 PM	SiCl4 pre valve opened
1/15/2013	2:50:54 PM	SiCl4 post valve opened
1/15/2013	2:50:54 PM	Bubbler valve opened
1/15/2013	2:50:54 PM	Helium MFC set to  0.000000
1/15/2013	2:50:54 PM	H2 MFC set to  450.000000
1/15/2013	2:50:54 PM	BCl3 MFC set to  1.300000
1/15/2013	2:50:54 PM	PH3 MFC set to  0.000000
1/15/2013	2:50:54 PM	SiCl4 MFC set to  50.000000
1/15/2013	2:50:54 PM	Bypass solenoid MFC set to  0.000000
1/15/2013	2:50:54 PM	Tube furnace set to 1000
1/15/2013	3:07:54 PM	Helium valve closed
1/15/2013	3:07:54 PM	BCl3 valve closed
1/15/2013	3:07:54 PM	PH3 valve closed
1/15/2013	3:07:54 PM	SiCl4 pre valve closed
1/15/2013	3:07:54 PM	SiCl4 post valve closed
1/15/2013	3:07:54 PM	Main Vac valve closed
1/15/2013	3:07:54 PM	Bypass valve closed
1/15/2013	3:07:54 PM	H2 valve opened
1/15/2013	3:07:54 PM	Bubbler valve opened
1/15/2013	3:07:54 PM	Helium MFC set to  0.000000
1/15/2013	3:07:54 PM	H2 MFC set to  500.000000
1/15/2013	3:07:54 PM	BCl3 MFC set to  0.000000
1/15/2013	3:07:54 PM	PH3 MFC set to  0.000000
1/15/2013	3:07:54 PM	SiCl4 MFC set to  0.000000
1/15/2013	3:07:55 PM	Bypass solenoid MFC set to  0.000000
1/15/2013	3:07:55 PM	Tube furnace set to 750
1/15/2013	3:12:55 PM	H2 valve closed
1/15/2013	3:12:55 PM	BCl3 valve closed
1/15/2013	3:12:55 PM	PH3 valve closed
1/15/2013	3:12:55 PM	SiCl4 pre valve closed
1/15/2013	3:12:55 PM	SiCl4 post valve closed
1/15/2013	3:12:55 PM	Main Vac valve closed
1/15/2013	3:12:55 PM	Bypass valve closed
1/15/2013	3:12:55 PM	Helium valve opened
1/15/2013	3:12:55 PM	Bubbler valve opened
1/15/2013	3:12:55 PM	Helium MFC set to  500.000000
1/15/2013	3:12:55 PM	H2 MFC set to  0.000000
1/15/2013	3:12:55 PM	BCl3 MFC set to  0.000000
1/15/2013	3:12:55 PM	PH3 MFC set to  0.000000
1/15/2013	3:12:55 PM	SiCl4 MFC set to  0.000000
1/15/2013	3:12:55 PM	Bypass solenoid MFC set to  0.000000
1/15/2013	3:12:55 PM	Tube furnace set to 0
1/15/2013	3:32:55 PM	Helium valve closed
1/15/2013	3:32:55 PM	H2 valve closed
1/15/2013	3:32:55 PM	BCl3 valve closed
1/15/2013	3:32:55 PM	PH3 valve closed
1/15/2013	3:32:55 PM	SiCl4 pre valve closed
1/15/2013	3:32:55 PM	SiCl4 post valve closed
1/15/2013	3:32:55 PM	Main Vac valve closed
1/15/2013	3:32:55 PM	Bypass valve closed
1/15/2013	3:32:55 PM	Bubbler valve closed
1/15/2013	3:32:55 PM	Helium MFC set to  0.000000
1/15/2013	3:32:55 PM	H2 MFC set to  0.000000
1/15/2013	3:32:55 PM	BCl3 MFC set to  0.000000
1/15/2013	3:32:55 PM	PH3 MFC set to  0.000000
1/15/2013	3:32:55 PM	SiCl4 MFC set to  0.000000
1/15/2013	3:32:55 PM	Bypass solenoid MFC set to  0.000000
1/15/2013	3:32:55 PM	Tube furnace set to 0
1/15/2013	3:32:56 PM	Run finished at 3:32 PM
1/15/2013	3:36:48 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/15/2013	3:36:48 PM	Recipe started at 3:36 PM
1/15/2013	3:36:48 PM	Helium valve closed
1/15/2013	3:36:48 PM	H2 valve closed
1/15/2013	3:36:48 PM	BCl3 valve closed
1/15/2013	3:36:48 PM	PH3 valve closed
1/15/2013	3:36:48 PM	SiCl4 pre valve closed
1/15/2013	3:36:48 PM	SiCl4 post valve closed
1/15/2013	3:36:48 PM	Main Vac valve closed
1/15/2013	3:36:48 PM	Bypass valve closed
1/15/2013	3:36:48 PM	Bubbler valve closed
1/15/2013	3:36:48 PM	Helium MFC set to  0.000000
1/15/2013	3:36:48 PM	H2 MFC set to  0.000000
1/15/2013	3:36:48 PM	BCl3 MFC set to  0.000000
1/15/2013	3:36:48 PM	PH3 MFC set to  0.000000
1/15/2013	3:36:49 PM	SiCl4 MFC set to  0.000000
1/15/2013	3:36:49 PM	Bypass solenoid MFC set to  0.000000
1/15/2013	3:36:49 PM	Tube furnace set to 0
1/15/2013	3:36:52 PM	H2 valve closed
1/15/2013	3:36:52 PM	BCl3 valve closed
1/15/2013	3:36:52 PM	PH3 valve closed
1/15/2013	3:36:52 PM	SiCl4 pre valve closed
1/15/2013	3:36:52 PM	SiCl4 post valve closed
1/15/2013	3:36:52 PM	Main Vac valve closed
1/15/2013	3:36:52 PM	Bypass valve closed
1/15/2013	3:36:52 PM	Bubbler valve closed
1/15/2013	3:36:52 PM	Helium valve opened
1/15/2013	3:36:52 PM	Helium MFC set to  500.000000
1/15/2013	3:36:52 PM	H2 MFC set to  0.000000
1/15/2013	3:36:52 PM	BCl3 MFC set to  0.000000
1/15/2013	3:36:52 PM	PH3 MFC set to  0.000000
1/15/2013	3:36:52 PM	SiCl4 MFC set to  0.000000
1/15/2013	3:36:52 PM	Bypass solenoid MFC set to  0.000000
1/15/2013	3:36:52 PM	Tube furnace set to 0
1/15/2013	3:36:52 PM	Helium valve closed
1/15/2013	3:36:52 PM	H2 valve closed
1/15/2013	3:36:52 PM	BCl3 valve closed
1/15/2013	3:36:52 PM	PH3 valve closed
1/15/2013	3:36:52 PM	SiCl4 pre valve closed
1/15/2013	3:36:52 PM	SiCl4 post valve closed
1/15/2013	3:36:52 PM	Main Vac valve closed
1/15/2013	3:36:52 PM	Bypass valve closed
1/15/2013	3:36:52 PM	Bubbler valve closed
1/15/2013	3:36:52 PM	Helium MFC set to  0.000000
1/15/2013	3:36:52 PM	H2 MFC set to  0.000000
1/15/2013	3:36:52 PM	BCl3 MFC set to  0.000000
1/15/2013	3:36:52 PM	PH3 MFC set to  0.000000
1/15/2013	3:36:52 PM	SiCl4 MFC set to  0.000000
1/15/2013	3:36:52 PM	Bypass solenoid MFC set to  0.000000
1/15/2013	3:36:52 PM	Tube furnace set to 0
1/15/2013	3:36:53 PM	Run finished at 3:36 PM
1/15/2013	3:36:53 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/15/2013	3:41:38 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/15/2013	3:41:39 PM	Recipe started at 3:41 PM
1/15/2013	3:41:39 PM	Helium valve closed
1/15/2013	3:41:39 PM	H2 valve closed
1/15/2013	3:41:39 PM	BCl3 valve closed
1/15/2013	3:41:39 PM	PH3 valve closed
1/15/2013	3:41:39 PM	SiCl4 pre valve closed
1/15/2013	3:41:39 PM	SiCl4 post valve closed
1/15/2013	3:41:39 PM	Main Vac valve closed
1/15/2013	3:41:39 PM	Bubbler valve closed
1/15/2013	3:41:39 PM	Bypass valve opened
1/15/2013	3:41:39 PM	Helium MFC set to  0.000000
1/15/2013	3:41:39 PM	H2 MFC set to  0.000000
1/15/2013	3:41:39 PM	BCl3 MFC set to  0.000000
1/15/2013	3:41:39 PM	PH3 MFC set to  0.000000
1/15/2013	3:41:39 PM	SiCl4 MFC set to  0.000000
1/15/2013	3:41:39 PM	Bypass solenoid MFC set to  0.000000
1/15/2013	3:41:39 PM	Tube furnace set to 0
1/15/2013	3:43:00 PM	Helium valve closed
1/15/2013	3:43:00 PM	H2 valve closed
1/15/2013	3:43:00 PM	BCl3 valve closed
1/15/2013	3:43:00 PM	PH3 valve closed
1/15/2013	3:43:00 PM	SiCl4 pre valve closed
1/15/2013	3:43:00 PM	SiCl4 post valve closed
1/15/2013	3:43:00 PM	Main Vac valve closed
1/15/2013	3:43:00 PM	Bubbler valve closed
1/15/2013	3:43:00 PM	Bypass valve opened
1/15/2013	3:43:00 PM	Helium MFC set to  0.000000
1/15/2013	3:43:00 PM	H2 MFC set to  0.000000
1/15/2013	3:43:00 PM	BCl3 MFC set to  0.000000
1/15/2013	3:43:00 PM	PH3 MFC set to  0.000000
1/15/2013	3:43:00 PM	SiCl4 MFC set to  0.000000
1/15/2013	3:43:00 PM	Bypass solenoid MFC set to  0.000000
1/15/2013	3:43:00 PM	Tube furnace set to 0
1/15/2013	3:44:00 PM	Helium valve closed
1/15/2013	3:44:00 PM	H2 valve closed
1/15/2013	3:44:00 PM	BCl3 valve closed
1/15/2013	3:44:00 PM	PH3 valve closed
1/15/2013	3:44:00 PM	SiCl4 pre valve closed
1/15/2013	3:44:00 PM	SiCl4 post valve closed
1/15/2013	3:44:00 PM	Bypass valve closed
1/15/2013	3:44:00 PM	Bubbler valve closed
1/15/2013	3:44:00 PM	Main Vac valve opened
1/15/2013	3:44:00 PM	Helium MFC set to  0.000000
1/15/2013	3:44:00 PM	H2 MFC set to  0.000000
1/15/2013	3:44:00 PM	BCl3 MFC set to  0.000000
1/15/2013	3:44:00 PM	PH3 MFC set to  0.000000
1/15/2013	3:44:00 PM	SiCl4 MFC set to  0.000000
1/15/2013	3:44:00 PM	Bypass solenoid MFC set to  0.000000
1/15/2013	3:44:00 PM	Tube furnace set to 0
1/15/2013	3:44:01 PM	Run finished at 3:44 PM
1/15/2013	3:44:01 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/15/2013	4:28:25 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
1/15/2013	4:28:32 PM	Recipe started at 4:28 PM
1/15/2013	4:28:32 PM	Helium valve closed
1/15/2013	4:28:32 PM	H2 valve closed
1/15/2013	4:28:32 PM	BCl3 valve closed
1/15/2013	4:28:32 PM	PH3 valve closed
1/15/2013	4:28:32 PM	SiCl4 pre valve closed
1/15/2013	4:28:32 PM	SiCl4 post valve closed
1/15/2013	4:28:32 PM	Main Vac valve closed
1/15/2013	4:28:32 PM	Bubbler valve closed
1/15/2013	4:28:32 PM	Bypass valve opened
1/15/2013	4:28:32 PM	Helium MFC set to  0.000000
1/15/2013	4:28:32 PM	H2 MFC set to  0.000000
1/15/2013	4:28:32 PM	BCl3 MFC set to  0.000000
1/15/2013	4:28:32 PM	PH3 MFC set to  0.000000
1/15/2013	4:28:32 PM	SiCl4 MFC set to  0.000000
1/15/2013	4:28:32 PM	Bypass solenoid MFC set to  0.000000
1/15/2013	4:28:32 PM	Tube furnace set to 0
1/15/2013	4:28:33 PM	Helium valve closed
1/15/2013	4:28:33 PM	H2 valve closed
1/15/2013	4:28:33 PM	BCl3 valve closed
1/15/2013	4:28:33 PM	PH3 valve closed
1/15/2013	4:28:33 PM	SiCl4 pre valve closed
1/15/2013	4:28:33 PM	SiCl4 post valve closed
1/15/2013	4:28:33 PM	Main Vac valve closed
1/15/2013	4:28:33 PM	Bubbler valve closed
1/15/2013	4:28:33 PM	Bypass valve opened
1/15/2013	4:28:33 PM	Helium MFC set to  0.000000
1/15/2013	4:28:33 PM	H2 MFC set to  0.000000
1/15/2013	4:28:33 PM	BCl3 MFC set to  0.000000
1/15/2013	4:28:33 PM	PH3 MFC set to  0.000000
1/15/2013	4:28:33 PM	SiCl4 MFC set to  0.000000
1/15/2013	4:28:33 PM	Bypass solenoid MFC set to  0.000000
1/15/2013	4:28:33 PM	Tube furnace set to 0
1/15/2013	4:28:34 PM	Helium valve closed
1/15/2013	4:28:34 PM	H2 valve closed
1/15/2013	4:28:34 PM	BCl3 valve closed
1/15/2013	4:28:34 PM	PH3 valve closed
1/15/2013	4:28:34 PM	SiCl4 pre valve closed
1/15/2013	4:28:34 PM	SiCl4 post valve closed
1/15/2013	4:28:34 PM	Bypass valve closed
1/15/2013	4:28:34 PM	Bubbler valve closed
1/15/2013	4:28:34 PM	Main Vac valve opened
1/15/2013	4:28:34 PM	Helium MFC set to  0.000000
1/15/2013	4:28:34 PM	H2 MFC set to  0.000000
1/15/2013	4:28:34 PM	BCl3 MFC set to  0.000000
1/15/2013	4:28:34 PM	PH3 MFC set to  0.000000
1/15/2013	4:28:34 PM	SiCl4 MFC set to  0.000000
1/15/2013	4:28:34 PM	Bypass solenoid MFC set to  0.000000
1/15/2013	4:28:34 PM	Tube furnace set to 0
1/15/2013	4:28:36 PM	H2 valve closed
1/15/2013	4:28:36 PM	BCl3 valve closed
1/15/2013	4:28:36 PM	PH3 valve closed
1/15/2013	4:28:36 PM	SiCl4 pre valve closed
1/15/2013	4:28:36 PM	SiCl4 post valve closed
1/15/2013	4:28:36 PM	Bypass valve closed
1/15/2013	4:28:36 PM	Bubbler valve closed
1/15/2013	4:28:36 PM	Helium valve opened
1/15/2013	4:28:36 PM	Main Vac valve opened
1/15/2013	4:28:36 PM	Helium MFC set to  20.000000
1/15/2013	4:28:36 PM	H2 MFC set to  0.000000
1/15/2013	4:28:36 PM	BCl3 MFC set to  0.000000
1/15/2013	4:28:36 PM	PH3 MFC set to  0.000000
1/15/2013	4:28:36 PM	SiCl4 MFC set to  0.000000
1/15/2013	4:28:36 PM	Bypass solenoid MFC set to  0.000000
1/15/2013	4:28:36 PM	Tube furnace set to 0
1/15/2013	4:29:06 PM	Helium valve closed
1/15/2013	4:29:06 PM	H2 valve closed
1/15/2013	4:29:06 PM	BCl3 valve closed
1/15/2013	4:29:06 PM	PH3 valve closed
1/15/2013	4:29:06 PM	SiCl4 pre valve closed
1/15/2013	4:29:06 PM	SiCl4 post valve closed
1/15/2013	4:29:06 PM	Bypass valve closed
1/15/2013	4:29:06 PM	Bubbler valve closed
1/15/2013	4:29:06 PM	Main Vac valve opened
1/15/2013	4:29:06 PM	Helium MFC set to  0.000000
1/15/2013	4:29:06 PM	H2 MFC set to  0.000000
1/15/2013	4:29:06 PM	BCl3 MFC set to  0.000000
1/15/2013	4:29:06 PM	PH3 MFC set to  0.000000
1/15/2013	4:29:06 PM	SiCl4 MFC set to  0.000000
1/15/2013	4:29:06 PM	Bypass solenoid MFC set to  0.000000
1/15/2013	4:29:06 PM	Tube furnace set to 0
1/15/2013	4:29:36 PM	H2 valve closed
1/15/2013	4:29:36 PM	BCl3 valve closed
1/15/2013	4:29:36 PM	PH3 valve closed
1/15/2013	4:29:36 PM	SiCl4 pre valve closed
1/15/2013	4:29:36 PM	SiCl4 post valve closed
1/15/2013	4:29:36 PM	Bypass valve closed
1/15/2013	4:29:36 PM	Bubbler valve closed
1/15/2013	4:29:36 PM	Helium valve opened
1/15/2013	4:29:36 PM	Main Vac valve opened
1/15/2013	4:29:36 PM	Helium MFC set to  20.000000
1/15/2013	4:29:36 PM	H2 MFC set to  0.000000
1/15/2013	4:29:36 PM	BCl3 MFC set to  0.000000
1/15/2013	4:29:36 PM	PH3 MFC set to  0.000000
1/15/2013	4:29:36 PM	SiCl4 MFC set to  0.000000
1/15/2013	4:29:36 PM	Bypass solenoid MFC set to  0.000000
1/15/2013	4:29:36 PM	Tube furnace set to 0
1/15/2013	4:30:06 PM	Helium valve closed
1/15/2013	4:30:06 PM	H2 valve closed
1/15/2013	4:30:06 PM	BCl3 valve closed
1/15/2013	4:30:06 PM	PH3 valve closed
1/15/2013	4:30:06 PM	SiCl4 pre valve closed
1/15/2013	4:30:06 PM	SiCl4 post valve closed
1/15/2013	4:30:06 PM	Bypass valve closed
1/15/2013	4:30:06 PM	Bubbler valve closed
1/15/2013	4:30:06 PM	Main Vac valve opened
1/15/2013	4:30:06 PM	Helium MFC set to  0.000000
1/15/2013	4:30:06 PM	H2 MFC set to  0.000000
1/15/2013	4:30:06 PM	BCl3 MFC set to  0.000000
1/15/2013	4:30:06 PM	PH3 MFC set to  0.000000
1/15/2013	4:30:06 PM	SiCl4 MFC set to  0.000000
1/15/2013	4:30:06 PM	Bypass solenoid MFC set to  0.000000
1/15/2013	4:30:06 PM	Tube furnace set to 0
1/15/2013	4:30:37 PM	H2 valve closed
1/15/2013	4:30:37 PM	BCl3 valve closed
1/15/2013	4:30:37 PM	PH3 valve closed
1/15/2013	4:30:37 PM	SiCl4 pre valve closed
1/15/2013	4:30:37 PM	SiCl4 post valve closed
1/15/2013	4:30:37 PM	Bypass valve closed
1/15/2013	4:30:37 PM	Bubbler valve closed
1/15/2013	4:30:37 PM	Helium valve opened
1/15/2013	4:30:37 PM	Main Vac valve opened
1/15/2013	4:30:37 PM	Helium MFC set to  20.000000
1/15/2013	4:30:37 PM	H2 MFC set to  0.000000
1/15/2013	4:30:37 PM	BCl3 MFC set to  0.000000
1/15/2013	4:30:37 PM	PH3 MFC set to  0.000000
1/15/2013	4:30:37 PM	SiCl4 MFC set to  0.000000
1/15/2013	4:30:37 PM	Bypass solenoid MFC set to  0.000000
1/15/2013	4:30:37 PM	Tube furnace set to 0
1/15/2013	4:31:07 PM	Helium valve closed
1/15/2013	4:31:07 PM	H2 valve closed
1/15/2013	4:31:07 PM	BCl3 valve closed
1/15/2013	4:31:07 PM	PH3 valve closed
1/15/2013	4:31:07 PM	SiCl4 pre valve closed
1/15/2013	4:31:07 PM	SiCl4 post valve closed
1/15/2013	4:31:07 PM	Bypass valve closed
1/15/2013	4:31:07 PM	Bubbler valve closed
1/15/2013	4:31:07 PM	Main Vac valve opened
1/15/2013	4:31:07 PM	Helium MFC set to  0.000000
1/15/2013	4:31:07 PM	H2 MFC set to  0.000000
1/15/2013	4:31:07 PM	BCl3 MFC set to  0.000000
1/15/2013	4:31:07 PM	PH3 MFC set to  0.000000
1/15/2013	4:31:07 PM	SiCl4 MFC set to  0.000000
1/15/2013	4:31:07 PM	Bypass solenoid MFC set to  0.000000
1/15/2013	4:31:07 PM	Tube furnace set to 0
1/15/2013	4:31:37 PM	H2 valve closed
1/15/2013	4:31:37 PM	BCl3 valve closed
1/15/2013	4:31:37 PM	PH3 valve closed
1/15/2013	4:31:37 PM	SiCl4 pre valve closed
1/15/2013	4:31:37 PM	SiCl4 post valve closed
1/15/2013	4:31:37 PM	Bypass valve closed
1/15/2013	4:31:37 PM	Bubbler valve closed
1/15/2013	4:31:37 PM	Helium valve opened
1/15/2013	4:31:37 PM	Main Vac valve opened
1/15/2013	4:31:37 PM	Helium MFC set to  20.000000
1/15/2013	4:31:37 PM	H2 MFC set to  0.000000
1/15/2013	4:31:37 PM	BCl3 MFC set to  0.000000
1/15/2013	4:31:37 PM	PH3 MFC set to  0.000000
1/15/2013	4:31:37 PM	SiCl4 MFC set to  0.000000
1/15/2013	4:31:37 PM	Bypass solenoid MFC set to  0.000000
1/15/2013	4:31:37 PM	Tube furnace set to 0
1/15/2013	4:32:07 PM	Helium valve closed
1/15/2013	4:32:07 PM	H2 valve closed
1/15/2013	4:32:07 PM	BCl3 valve closed
1/15/2013	4:32:07 PM	PH3 valve closed
1/15/2013	4:32:07 PM	SiCl4 pre valve closed
1/15/2013	4:32:07 PM	SiCl4 post valve closed
1/15/2013	4:32:07 PM	Bypass valve closed
1/15/2013	4:32:07 PM	Bubbler valve closed
1/15/2013	4:32:07 PM	Main Vac valve opened
1/15/2013	4:32:07 PM	Helium MFC set to  0.000000
1/15/2013	4:32:07 PM	H2 MFC set to  0.000000
1/15/2013	4:32:07 PM	BCl3 MFC set to  0.000000
1/15/2013	4:32:07 PM	PH3 MFC set to  0.000000
1/15/2013	4:32:07 PM	SiCl4 MFC set to  0.000000
1/15/2013	4:32:07 PM	Bypass solenoid MFC set to  0.000000
1/15/2013	4:32:07 PM	Tube furnace set to 0
1/15/2013	4:32:37 PM	H2 valve closed
1/15/2013	4:32:37 PM	BCl3 valve closed
1/15/2013	4:32:37 PM	PH3 valve closed
1/15/2013	4:32:37 PM	SiCl4 pre valve closed
1/15/2013	4:32:37 PM	SiCl4 post valve closed
1/15/2013	4:32:38 PM	Bypass valve closed
1/15/2013	4:32:38 PM	Bubbler valve closed
1/15/2013	4:32:38 PM	Helium valve opened
1/15/2013	4:32:38 PM	Main Vac valve opened
1/15/2013	4:32:38 PM	Helium MFC set to  20.000000
1/15/2013	4:32:38 PM	H2 MFC set to  0.000000
1/15/2013	4:32:38 PM	BCl3 MFC set to  0.000000
1/15/2013	4:32:38 PM	PH3 MFC set to  0.000000
1/15/2013	4:32:38 PM	SiCl4 MFC set to  0.000000
1/15/2013	4:32:38 PM	Bypass solenoid MFC set to  0.000000
1/15/2013	4:32:38 PM	Tube furnace set to 0
1/15/2013	4:33:08 PM	Helium valve closed
1/15/2013	4:33:08 PM	H2 valve closed
1/15/2013	4:33:08 PM	BCl3 valve closed
1/15/2013	4:33:08 PM	PH3 valve closed
1/15/2013	4:33:08 PM	SiCl4 pre valve closed
1/15/2013	4:33:08 PM	SiCl4 post valve closed
1/15/2013	4:33:08 PM	Bypass valve closed
1/15/2013	4:33:08 PM	Bubbler valve closed
1/15/2013	4:33:08 PM	Main Vac valve opened
1/15/2013	4:33:08 PM	Helium MFC set to  0.000000
1/15/2013	4:33:08 PM	H2 MFC set to  0.000000
1/15/2013	4:33:08 PM	BCl3 MFC set to  0.000000
1/15/2013	4:33:08 PM	PH3 MFC set to  0.000000
1/15/2013	4:33:08 PM	SiCl4 MFC set to  0.000000
1/15/2013	4:33:08 PM	Bypass solenoid MFC set to  0.000000
1/15/2013	4:33:08 PM	Tube furnace set to 0
1/15/2013	4:33:38 PM	H2 valve closed
1/15/2013	4:33:38 PM	BCl3 valve closed
1/15/2013	4:33:38 PM	PH3 valve closed
1/15/2013	4:33:38 PM	SiCl4 pre valve closed
1/15/2013	4:33:38 PM	SiCl4 post valve closed
1/15/2013	4:33:38 PM	Bypass valve closed
1/15/2013	4:33:38 PM	Bubbler valve closed
1/15/2013	4:33:38 PM	Helium valve opened
1/15/2013	4:33:38 PM	Main Vac valve opened
1/15/2013	4:33:38 PM	Helium MFC set to  20.000000
1/15/2013	4:33:38 PM	H2 MFC set to  0.000000
1/15/2013	4:33:38 PM	BCl3 MFC set to  0.000000
1/15/2013	4:33:38 PM	PH3 MFC set to  0.000000
1/15/2013	4:33:38 PM	SiCl4 MFC set to  0.000000
1/15/2013	4:33:38 PM	Bypass solenoid MFC set to  0.000000
1/15/2013	4:33:38 PM	Tube furnace set to 0
1/15/2013	4:34:08 PM	Helium valve closed
1/15/2013	4:34:08 PM	H2 valve closed
1/15/2013	4:34:08 PM	BCl3 valve closed
1/15/2013	4:34:08 PM	PH3 valve closed
1/15/2013	4:34:08 PM	SiCl4 pre valve closed
1/15/2013	4:34:08 PM	SiCl4 post valve closed
1/15/2013	4:34:08 PM	Bypass valve closed
1/15/2013	4:34:08 PM	Bubbler valve closed
1/15/2013	4:34:08 PM	Main Vac valve opened
1/15/2013	4:34:08 PM	Helium MFC set to  0.000000
1/15/2013	4:34:08 PM	H2 MFC set to  0.000000
1/15/2013	4:34:08 PM	BCl3 MFC set to  0.000000
1/15/2013	4:34:08 PM	PH3 MFC set to  0.000000
1/15/2013	4:34:08 PM	SiCl4 MFC set to  0.000000
1/15/2013	4:34:08 PM	Bypass solenoid MFC set to  0.000000
1/15/2013	4:34:08 PM	Tube furnace set to 0
1/15/2013	4:34:38 PM	H2 valve closed
1/15/2013	4:34:38 PM	BCl3 valve closed
1/15/2013	4:34:38 PM	PH3 valve closed
1/15/2013	4:34:38 PM	SiCl4 pre valve closed
1/15/2013	4:34:38 PM	SiCl4 post valve closed
1/15/2013	4:34:38 PM	Bypass valve closed
1/15/2013	4:34:38 PM	Bubbler valve closed
1/15/2013	4:34:38 PM	Helium valve opened
1/15/2013	4:34:38 PM	Main Vac valve opened
1/15/2013	4:34:38 PM	Helium MFC set to  20.000000
1/15/2013	4:34:39 PM	H2 MFC set to  0.000000
1/15/2013	4:34:39 PM	BCl3 MFC set to  0.000000
1/15/2013	4:34:39 PM	PH3 MFC set to  0.000000
1/15/2013	4:34:39 PM	SiCl4 MFC set to  0.000000
1/15/2013	4:34:39 PM	Bypass solenoid MFC set to  0.000000
1/15/2013	4:34:39 PM	Tube furnace set to 0
1/15/2013	4:35:09 PM	Helium valve closed
1/15/2013	4:35:09 PM	H2 valve closed
1/15/2013	4:35:09 PM	BCl3 valve closed
1/15/2013	4:35:09 PM	PH3 valve closed
1/15/2013	4:35:09 PM	SiCl4 pre valve closed
1/15/2013	4:35:09 PM	SiCl4 post valve closed
1/15/2013	4:35:09 PM	Bypass valve closed
1/15/2013	4:35:09 PM	Bubbler valve closed
1/15/2013	4:35:09 PM	Main Vac valve opened
1/15/2013	4:35:09 PM	Helium MFC set to  0.000000
1/15/2013	4:35:09 PM	H2 MFC set to  0.000000
1/15/2013	4:35:09 PM	BCl3 MFC set to  0.000000
1/15/2013	4:35:09 PM	PH3 MFC set to  0.000000
1/15/2013	4:35:09 PM	SiCl4 MFC set to  0.000000
1/15/2013	4:35:09 PM	Bypass solenoid MFC set to  0.000000
1/15/2013	4:35:09 PM	Tube furnace set to 0
1/15/2013	4:35:39 PM	H2 valve closed
1/15/2013	4:35:39 PM	BCl3 valve closed
1/15/2013	4:35:39 PM	PH3 valve closed
1/15/2013	4:35:39 PM	SiCl4 pre valve closed
1/15/2013	4:35:39 PM	SiCl4 post valve closed
1/15/2013	4:35:39 PM	Bypass valve closed
1/15/2013	4:35:39 PM	Bubbler valve closed
1/15/2013	4:35:39 PM	Helium valve opened
1/15/2013	4:35:39 PM	Main Vac valve opened
1/15/2013	4:35:39 PM	Helium MFC set to  20.000000
1/15/2013	4:35:39 PM	H2 MFC set to  0.000000
1/15/2013	4:35:39 PM	BCl3 MFC set to  0.000000
1/15/2013	4:35:39 PM	PH3 MFC set to  0.000000
1/15/2013	4:35:39 PM	SiCl4 MFC set to  0.000000
1/15/2013	4:35:39 PM	Bypass solenoid MFC set to  0.000000
1/15/2013	4:35:39 PM	Tube furnace set to 0
1/15/2013	4:36:09 PM	Helium valve closed
1/15/2013	4:36:09 PM	H2 valve closed
1/15/2013	4:36:09 PM	BCl3 valve closed
1/15/2013	4:36:09 PM	PH3 valve closed
1/15/2013	4:36:09 PM	SiCl4 pre valve closed
1/15/2013	4:36:09 PM	SiCl4 post valve closed
1/15/2013	4:36:09 PM	Bypass valve closed
1/15/2013	4:36:09 PM	Bubbler valve closed
1/15/2013	4:36:09 PM	Main Vac valve opened
1/15/2013	4:36:09 PM	Helium MFC set to  0.000000
1/15/2013	4:36:09 PM	H2 MFC set to  0.000000
1/15/2013	4:36:09 PM	BCl3 MFC set to  0.000000
1/15/2013	4:36:09 PM	PH3 MFC set to  0.000000
1/15/2013	4:36:09 PM	SiCl4 MFC set to  0.000000
1/15/2013	4:36:09 PM	Bypass solenoid MFC set to  0.000000
1/15/2013	4:36:09 PM	Tube furnace set to 0
1/15/2013	4:36:39 PM	H2 valve closed
1/15/2013	4:36:39 PM	BCl3 valve closed
1/15/2013	4:36:39 PM	PH3 valve closed
1/15/2013	4:36:39 PM	SiCl4 pre valve closed
1/15/2013	4:36:39 PM	SiCl4 post valve closed
1/15/2013	4:36:39 PM	Bypass valve closed
1/15/2013	4:36:39 PM	Bubbler valve closed
1/15/2013	4:36:39 PM	Helium valve opened
1/15/2013	4:36:39 PM	Main Vac valve opened
1/15/2013	4:36:39 PM	Helium MFC set to  20.000000
1/15/2013	4:36:39 PM	H2 MFC set to  0.000000
1/15/2013	4:36:39 PM	BCl3 MFC set to  0.000000
1/15/2013	4:36:39 PM	PH3 MFC set to  0.000000
1/15/2013	4:36:39 PM	SiCl4 MFC set to  0.000000
1/15/2013	4:36:39 PM	Bypass solenoid MFC set to  0.000000
1/15/2013	4:36:40 PM	Tube furnace set to 0
1/15/2013	4:37:10 PM	Helium valve closed
1/15/2013	4:37:10 PM	H2 valve closed
1/15/2013	4:37:10 PM	BCl3 valve closed
1/15/2013	4:37:10 PM	PH3 valve closed
1/15/2013	4:37:10 PM	SiCl4 pre valve closed
1/15/2013	4:37:10 PM	SiCl4 post valve closed
1/15/2013	4:37:10 PM	Bypass valve closed
1/15/2013	4:37:10 PM	Bubbler valve closed
1/15/2013	4:37:10 PM	Main Vac valve opened
1/15/2013	4:37:10 PM	Helium MFC set to  0.000000
1/15/2013	4:37:10 PM	H2 MFC set to  0.000000
1/15/2013	4:37:10 PM	BCl3 MFC set to  0.000000
1/15/2013	4:37:10 PM	PH3 MFC set to  0.000000
1/15/2013	4:37:10 PM	SiCl4 MFC set to  0.000000
1/15/2013	4:37:10 PM	Bypass solenoid MFC set to  0.000000
1/15/2013	4:37:10 PM	Tube furnace set to 0
1/15/2013	4:37:40 PM	H2 valve closed
1/15/2013	4:37:40 PM	BCl3 valve closed
1/15/2013	4:37:40 PM	PH3 valve closed
1/15/2013	4:37:40 PM	SiCl4 pre valve closed
1/15/2013	4:37:40 PM	SiCl4 post valve closed
1/15/2013	4:37:40 PM	Bypass valve closed
1/15/2013	4:37:40 PM	Bubbler valve closed
1/15/2013	4:37:40 PM	Helium valve opened
1/15/2013	4:37:40 PM	Main Vac valve opened
1/15/2013	4:37:40 PM	Helium MFC set to  20.000000
1/15/2013	4:37:40 PM	H2 MFC set to  0.000000
1/15/2013	4:37:40 PM	BCl3 MFC set to  0.000000
1/15/2013	4:37:40 PM	PH3 MFC set to  0.000000
1/15/2013	4:37:40 PM	SiCl4 MFC set to  0.000000
1/15/2013	4:37:40 PM	Bypass solenoid MFC set to  0.000000
1/15/2013	4:37:40 PM	Tube furnace set to 0
1/15/2013	4:38:10 PM	Helium valve closed
1/15/2013	4:38:10 PM	H2 valve closed
1/15/2013	4:38:10 PM	BCl3 valve closed
1/15/2013	4:38:10 PM	PH3 valve closed
1/15/2013	4:38:10 PM	SiCl4 pre valve closed
1/15/2013	4:38:10 PM	SiCl4 post valve closed
1/15/2013	4:38:10 PM	Bypass valve closed
1/15/2013	4:38:10 PM	Bubbler valve closed
1/15/2013	4:38:10 PM	Main Vac valve opened
1/15/2013	4:38:10 PM	Helium MFC set to  0.000000
1/15/2013	4:38:10 PM	H2 MFC set to  0.000000
1/15/2013	4:38:10 PM	BCl3 MFC set to  0.000000
1/15/2013	4:38:10 PM	PH3 MFC set to  0.000000
1/15/2013	4:38:10 PM	SiCl4 MFC set to  0.000000
1/15/2013	4:38:10 PM	Bypass solenoid MFC set to  0.000000
1/15/2013	4:38:10 PM	Tube furnace set to 0
1/15/2013	4:38:11 PM	Run finished at 4:38 PM
1/15/2013	4:38:11 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
1/15/2013	4:38:59 PM	Recipe started at 4:38 PM
1/15/2013	4:38:59 PM	Helium valve closed
1/15/2013	4:38:59 PM	H2 valve closed
1/15/2013	4:38:59 PM	BCl3 valve closed
1/15/2013	4:38:59 PM	PH3 valve closed
1/15/2013	4:38:59 PM	SiCl4 pre valve closed
1/15/2013	4:38:59 PM	SiCl4 post valve closed
1/15/2013	4:38:59 PM	Main Vac valve closed
1/15/2013	4:38:59 PM	Bypass valve closed
1/15/2013	4:38:59 PM	Bubbler valve closed
1/15/2013	4:38:59 PM	Helium MFC set to  0.000000
1/15/2013	4:38:59 PM	H2 MFC set to  0.000000
1/15/2013	4:38:59 PM	BCl3 MFC set to  0.000000
1/15/2013	4:38:59 PM	PH3 MFC set to  0.000000
1/15/2013	4:38:59 PM	SiCl4 MFC set to  0.000000
1/15/2013	4:38:59 PM	Bypass solenoid MFC set to  0.000000
1/15/2013	4:38:59 PM	Tube furnace set to 0
1/15/2013	4:39:02 PM	Helium valve closed
1/15/2013	4:39:02 PM	BCl3 valve closed
1/15/2013	4:39:02 PM	PH3 valve closed
1/15/2013	4:39:02 PM	SiCl4 pre valve closed
1/15/2013	4:39:02 PM	SiCl4 post valve closed
1/15/2013	4:39:02 PM	Main Vac valve closed
1/15/2013	4:39:02 PM	Bypass valve closed
1/15/2013	4:39:02 PM	Bubbler valve closed
1/15/2013	4:39:03 PM	H2 valve opened
1/15/2013	4:39:03 PM	Helium MFC set to  0.000000
1/15/2013	4:39:03 PM	H2 MFC set to  500.000000
1/15/2013	4:39:03 PM	BCl3 MFC set to  0.000000
1/15/2013	4:39:03 PM	PH3 MFC set to  0.000000
1/15/2013	4:39:03 PM	SiCl4 MFC set to  0.000000
1/15/2013	4:39:03 PM	Bypass solenoid MFC set to  0.000000
1/15/2013	4:39:03 PM	Tube furnace set to 0
1/15/2013	4:40:19 PM	Helium valve closed
1/15/2013	4:40:19 PM	BCl3 valve closed
1/15/2013	4:40:19 PM	PH3 valve closed
1/15/2013	4:40:19 PM	SiCl4 pre valve closed
1/15/2013	4:40:19 PM	SiCl4 post valve closed
1/15/2013	4:40:19 PM	Main Vac valve closed
1/15/2013	4:40:19 PM	Bypass valve closed
1/15/2013	4:40:19 PM	H2 valve opened
1/15/2013	4:40:19 PM	Bubbler valve opened
1/15/2013	4:40:19 PM	Helium MFC set to  0.000000
1/15/2013	4:40:19 PM	H2 MFC set to  500.000000
1/15/2013	4:40:19 PM	BCl3 MFC set to  0.000000
1/15/2013	4:40:19 PM	PH3 MFC set to  0.000000
1/15/2013	4:40:19 PM	SiCl4 MFC set to  0.000000
1/15/2013	4:40:19 PM	Bypass solenoid MFC set to  0.000000
1/15/2013	4:40:19 PM	Tube furnace set to 0
1/15/2013	4:40:20 PM	Helium valve closed
1/15/2013	4:40:20 PM	BCl3 valve closed
1/15/2013	4:40:20 PM	PH3 valve closed
1/15/2013	4:40:20 PM	SiCl4 pre valve closed
1/15/2013	4:40:20 PM	SiCl4 post valve closed
1/15/2013	4:40:20 PM	Main Vac valve closed
1/15/2013	4:40:20 PM	Bypass valve closed
1/15/2013	4:40:20 PM	H2 valve opened
1/15/2013	4:40:20 PM	Bubbler valve opened
1/15/2013	4:40:20 PM	Helium MFC set to  0.000000
1/15/2013	4:40:20 PM	H2 MFC set to  500.000000
1/15/2013	4:40:20 PM	BCl3 MFC set to  0.000000
1/15/2013	4:40:20 PM	PH3 MFC set to  0.000000
1/15/2013	4:40:20 PM	SiCl4 MFC set to  0.000000
1/15/2013	4:40:20 PM	Bypass solenoid MFC set to  0.000000
1/15/2013	4:40:20 PM	Tube furnace set to 1000
1/15/2013	5:00:20 PM	Helium valve closed
1/15/2013	5:00:20 PM	PH3 valve closed
1/15/2013	5:00:20 PM	Main Vac valve closed
1/15/2013	5:00:20 PM	Bypass valve closed
1/15/2013	5:00:20 PM	H2 valve opened
1/15/2013	5:00:20 PM	BCl3 valve opened
1/15/2013	5:00:20 PM	SiCl4 pre valve opened
1/15/2013	5:00:20 PM	SiCl4 post valve opened
1/15/2013	5:00:20 PM	Bubbler valve opened
1/15/2013	5:00:20 PM	Helium MFC set to  0.000000
1/15/2013	5:00:20 PM	H2 MFC set to  450.000000
1/15/2013	5:00:20 PM	BCl3 MFC set to  1.300000
1/15/2013	5:00:20 PM	PH3 MFC set to  0.000000
1/15/2013	5:00:20 PM	SiCl4 MFC set to  50.000000
1/15/2013	5:00:20 PM	Bypass solenoid MFC set to  0.000000
1/15/2013	5:00:20 PM	Tube furnace set to 1000
1/15/2013	5:14:20 PM	Helium valve closed
1/15/2013	5:14:20 PM	BCl3 valve closed
1/15/2013	5:14:20 PM	PH3 valve closed
1/15/2013	5:14:20 PM	SiCl4 pre valve closed
1/15/2013	5:14:20 PM	SiCl4 post valve closed
1/15/2013	5:14:20 PM	Main Vac valve closed
1/15/2013	5:14:20 PM	Bypass valve closed
1/15/2013	5:14:20 PM	H2 valve opened
1/15/2013	5:14:20 PM	Bubbler valve opened
1/15/2013	5:14:20 PM	Helium MFC set to  0.000000
1/15/2013	5:14:20 PM	H2 MFC set to  500.000000
1/15/2013	5:14:20 PM	BCl3 MFC set to  0.000000
1/15/2013	5:14:20 PM	PH3 MFC set to  0.000000
1/15/2013	5:14:20 PM	SiCl4 MFC set to  0.000000
1/15/2013	5:14:20 PM	Bypass solenoid MFC set to  0.000000
1/15/2013	5:14:21 PM	Tube furnace set to 750
1/15/2013	5:19:21 PM	H2 valve closed
1/15/2013	5:19:21 PM	BCl3 valve closed
1/15/2013	5:19:21 PM	PH3 valve closed
1/15/2013	5:19:21 PM	SiCl4 pre valve closed
1/15/2013	5:19:21 PM	SiCl4 post valve closed
1/15/2013	5:19:21 PM	Main Vac valve closed
1/15/2013	5:19:21 PM	Bypass valve closed
1/15/2013	5:19:21 PM	Helium valve opened
1/15/2013	5:19:21 PM	Bubbler valve opened
1/15/2013	5:19:21 PM	Helium MFC set to  500.000000
1/15/2013	5:19:21 PM	H2 MFC set to  0.000000
1/15/2013	5:19:21 PM	BCl3 MFC set to  0.000000
1/15/2013	5:19:21 PM	PH3 MFC set to  0.000000
1/15/2013	5:19:21 PM	SiCl4 MFC set to  0.000000
1/15/2013	5:19:21 PM	Bypass solenoid MFC set to  0.000000
1/15/2013	5:19:21 PM	Tube furnace set to 0
1/15/2013	5:39:21 PM	Helium valve closed
1/15/2013	5:39:21 PM	H2 valve closed
1/15/2013	5:39:21 PM	BCl3 valve closed
1/15/2013	5:39:21 PM	PH3 valve closed
1/15/2013	5:39:21 PM	SiCl4 pre valve closed
1/15/2013	5:39:21 PM	SiCl4 post valve closed
1/15/2013	5:39:21 PM	Main Vac valve closed
1/15/2013	5:39:21 PM	Bypass valve closed
1/15/2013	5:39:21 PM	Bubbler valve closed
1/15/2013	5:39:21 PM	Helium MFC set to  0.000000
1/15/2013	5:39:21 PM	H2 MFC set to  0.000000
1/15/2013	5:39:21 PM	BCl3 MFC set to  0.000000
1/15/2013	5:39:21 PM	PH3 MFC set to  0.000000
1/15/2013	5:39:21 PM	SiCl4 MFC set to  0.000000
1/15/2013	5:39:21 PM	Bypass solenoid MFC set to  0.000000
1/15/2013	5:39:21 PM	Tube furnace set to 0
1/15/2013	5:39:22 PM	Run finished at 5:39 PM
1/15/2013	5:41:25 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/15/2013	5:41:26 PM	Recipe started at 5:41 PM
1/15/2013	5:41:26 PM	Helium valve closed
1/15/2013	5:41:26 PM	H2 valve closed
1/15/2013	5:41:26 PM	BCl3 valve closed
1/15/2013	5:41:26 PM	PH3 valve closed
1/15/2013	5:41:26 PM	SiCl4 pre valve closed
1/15/2013	5:41:26 PM	SiCl4 post valve closed
1/15/2013	5:41:26 PM	Main Vac valve closed
1/15/2013	5:41:26 PM	Bypass valve closed
1/15/2013	5:41:26 PM	Bubbler valve closed
1/15/2013	5:41:26 PM	Helium MFC set to  0.000000
1/15/2013	5:41:26 PM	H2 MFC set to  0.000000
1/15/2013	5:41:26 PM	BCl3 MFC set to  0.000000
1/15/2013	5:41:26 PM	PH3 MFC set to  0.000000
1/15/2013	5:41:26 PM	SiCl4 MFC set to  0.000000
1/15/2013	5:41:26 PM	Bypass solenoid MFC set to  0.000000
1/15/2013	5:41:26 PM	Tube furnace set to 0
1/15/2013	5:41:29 PM	H2 valve closed
1/15/2013	5:41:29 PM	BCl3 valve closed
1/15/2013	5:41:29 PM	PH3 valve closed
1/15/2013	5:41:29 PM	SiCl4 pre valve closed
1/15/2013	5:41:29 PM	SiCl4 post valve closed
1/15/2013	5:41:29 PM	Main Vac valve closed
1/15/2013	5:41:29 PM	Bypass valve closed
1/15/2013	5:41:29 PM	Bubbler valve closed
1/15/2013	5:41:29 PM	Helium valve opened
1/15/2013	5:41:29 PM	Helium MFC set to  500.000000
1/15/2013	5:41:29 PM	H2 MFC set to  0.000000
1/15/2013	5:41:29 PM	BCl3 MFC set to  0.000000
1/15/2013	5:41:29 PM	PH3 MFC set to  0.000000
1/15/2013	5:41:29 PM	SiCl4 MFC set to  0.000000
1/15/2013	5:41:29 PM	Bypass solenoid MFC set to  0.000000
1/15/2013	5:41:29 PM	Tube furnace set to 0
1/15/2013	5:41:30 PM	Helium valve closed
1/15/2013	5:41:30 PM	H2 valve closed
1/15/2013	5:41:30 PM	BCl3 valve closed
1/15/2013	5:41:30 PM	PH3 valve closed
1/15/2013	5:41:30 PM	SiCl4 pre valve closed
1/15/2013	5:41:30 PM	SiCl4 post valve closed
1/15/2013	5:41:30 PM	Main Vac valve closed
1/15/2013	5:41:30 PM	Bypass valve closed
1/15/2013	5:41:30 PM	Bubbler valve closed
1/15/2013	5:41:30 PM	Helium MFC set to  0.000000
1/15/2013	5:41:30 PM	H2 MFC set to  0.000000
1/15/2013	5:41:30 PM	BCl3 MFC set to  0.000000
1/15/2013	5:41:30 PM	PH3 MFC set to  0.000000
1/15/2013	5:41:30 PM	SiCl4 MFC set to  0.000000
1/15/2013	5:41:30 PM	Bypass solenoid MFC set to  0.000000
1/15/2013	5:41:30 PM	Tube furnace set to 0
1/15/2013	5:41:31 PM	Run finished at 5:41 PM
1/15/2013	5:41:31 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/15/2013	5:46:02 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/15/2013	5:46:03 PM	Recipe started at 5:46 PM
1/15/2013	5:46:03 PM	Helium valve closed
1/15/2013	5:46:03 PM	H2 valve closed
1/15/2013	5:46:03 PM	BCl3 valve closed
1/15/2013	5:46:03 PM	PH3 valve closed
1/15/2013	5:46:03 PM	SiCl4 pre valve closed
1/15/2013	5:46:03 PM	SiCl4 post valve closed
1/15/2013	5:46:03 PM	Main Vac valve closed
1/15/2013	5:46:03 PM	Bubbler valve closed
1/15/2013	5:46:03 PM	Bypass valve opened
1/15/2013	5:46:03 PM	Helium MFC set to  0.000000
1/15/2013	5:46:03 PM	H2 MFC set to  0.000000
1/15/2013	5:46:03 PM	BCl3 MFC set to  0.000000
1/15/2013	5:46:03 PM	PH3 MFC set to  0.000000
1/15/2013	5:46:03 PM	SiCl4 MFC set to  0.000000
1/15/2013	5:46:03 PM	Bypass solenoid MFC set to  0.000000
1/15/2013	5:46:03 PM	Tube furnace set to 0
1/15/2013	5:47:24 PM	Helium valve closed
1/15/2013	5:47:24 PM	H2 valve closed
1/15/2013	5:47:24 PM	BCl3 valve closed
1/15/2013	5:47:24 PM	PH3 valve closed
1/15/2013	5:47:24 PM	SiCl4 pre valve closed
1/15/2013	5:47:24 PM	SiCl4 post valve closed
1/15/2013	5:47:24 PM	Main Vac valve closed
1/15/2013	5:47:24 PM	Bubbler valve closed
1/15/2013	5:47:24 PM	Bypass valve opened
1/15/2013	5:47:24 PM	Helium MFC set to  0.000000
1/15/2013	5:47:24 PM	H2 MFC set to  0.000000
1/15/2013	5:47:24 PM	BCl3 MFC set to  0.000000
1/15/2013	5:47:24 PM	PH3 MFC set to  0.000000
1/15/2013	5:47:24 PM	SiCl4 MFC set to  0.000000
1/15/2013	5:47:24 PM	Bypass solenoid MFC set to  0.000000
1/15/2013	5:47:24 PM	Tube furnace set to 0
1/15/2013	5:48:24 PM	Helium valve closed
1/15/2013	5:48:24 PM	H2 valve closed
1/15/2013	5:48:24 PM	BCl3 valve closed
1/15/2013	5:48:24 PM	PH3 valve closed
1/15/2013	5:48:24 PM	SiCl4 pre valve closed
1/15/2013	5:48:24 PM	SiCl4 post valve closed
1/15/2013	5:48:24 PM	Bypass valve closed
1/15/2013	5:48:24 PM	Bubbler valve closed
1/15/2013	5:48:24 PM	Main Vac valve opened
1/15/2013	5:48:24 PM	Helium MFC set to  0.000000
1/15/2013	5:48:24 PM	H2 MFC set to  0.000000
1/15/2013	5:48:24 PM	BCl3 MFC set to  0.000000
1/15/2013	5:48:24 PM	PH3 MFC set to  0.000000
1/15/2013	5:48:24 PM	SiCl4 MFC set to  0.000000
1/15/2013	5:48:24 PM	Bypass solenoid MFC set to  0.000000
1/15/2013	5:48:25 PM	Tube furnace set to 0
1/15/2013	5:48:26 PM	Run finished at 5:48 PM
1/15/2013	5:48:26 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
